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    Horizontal PECVD Equipment

    PRODUCTS AND SERVICES > Horizontal Furnaces Series > Horizontal PECVD Equipment

    Horizontal PECVD Equipment

      Features  

    · Reliable electrode contact, effectively reduce dust as well as the frequency of high frequency alarms.

    · Simple and reliable automatic boat loading/unloading unit improves themaintenance space and convenience of the equipment.

    · Single-sided installation and maintenance of moving parts,reducing the footprint of the back-to-back equipment without affecting the maintenance of the equipment.

    · High-speed and stable integral module boat pushing mechanism.

    · Auxiliary heating patent technology.

    · Rapid coating technology.

    · MES software & CCC system with independent intellectual property rights.